Does your particle counter
contaminate your cleanroom?
Do you trust the results?
How much time do you spend
recording and analyzing the data?
Introducing the MET ONE 3411 0.1 micron sensitivity portable airborne particle
counter. Unlike many particle counters the MET ONE 3411 fan remains off when
operating in a standard semiconductor cleanroom environment thus particle
generation is virtually eliminated.
The MET ONE 3411 is designed to meet the rigorous requirements of ISO-21501-4 to provide
the users with unparalleled accuracy. This assures the repeatability of particle measurements
between multiple instruments; critical for process benchmarking and troubleshooting activities.
Specifications
CLASS 1 LASER PRODUCT
Contact manufacturer for complete compliance details
Number of Size Channels 6
Particle Sizes 0.1, 0.2, 0.3, 0.5, 1.0, 5.0
Flow Rate 1.0 CFM (28.3 LPM)
Zero Count ISO 21501-4 and JIS B 9921: 1 count or less in 5 minutes, 95% UCL
Coincidence Loss 5% at 50,000 /ft3 per ISO 21501-4 method
Counting Efficiency 50% at 0.1 ¥ìm;
100% for particles > 0.15 ¥ìm per ISO 21501-4 and JIS B 9921
Light Source Helium Neon Laser, 5 mW Max Power at 632.8 nm
Pump Type Patented multi-lobe closed loop controlled rated for continuous use
Display ¨ù VGA Color TFT touch screen
Printer High speed thermal
Language English, French, German, Italian, Spanish, Korean*, Japanese*,
Chinese (Simplified and Traditional)*
Maximum Count Displayed 9,999,999 displayed
Delay Time 15 seconds to 23 hours 59 minutes 59 seconds
Sample/Hold Times 1 second to 23 hours 59 minutes 59 seconds
Count Alarms 1 to 9,999,999 counts
Data Storage 5,000 samples, scrollable on Historical Data review screen
(FIFO or Overflow)
Locations ID: 0 to 999; NAME: Alphanumeric, appears on printout
Outputs USB Client (Version 1.1)
USB Host (Version 1.1)
RS-485
Ethernet with TCP/IP protocol
Wireless with 802.11g protocol (optional)
MET ONE 2432 Manifold
Auxiliary (alarm and scan probe)
Communication Protocol Modbus TCP, Modbus RTU, Serial FX
Inputs Air Velocity Probe
RH/Temperature Probe
Auto CDA Purge Purge solenoid activated by connection to CDA
Battery Type Lithium ion smart battery; rechargeable, ejectable, and hot-swappable
Battery Quantity Included 2
Battery Operating Time 3 hours minimum
Battery Recharge Time 6.75 hours minimum, 10 hours maximum
Power 24 VDC with 100-240 VAC, 50/60 Hz adapter
Enclosure Material Easy to clean passivated Stainless Steel
Size 33 W x 55.9 D x 22.9 H cm (13 x 22 x 9 inches)
including protrusions, handles, feet, etc.
Weight Without battery: 15.9 kg (35 lbs), Battery: 0.66 kg (1.45 lbs)
Environment Operating 10¡Æ to 40¡ÆC (50¡Æ to 104¡ÆF);
10 to 90% relative humidity, non-condensing
Storage -40¡Æ to 50¡ÆC (-40¡Æ to 122¡ÆF);
10 to 90% relative humidity, non-condensing
Optional Accessories Smart Battery Charger/Calibrator: PN 280-300-5000
Additional Battery: PN 280-120-2024
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